강하넷 |
진단 Report |
◎ : 매우 잘함 |
○ : 잘함 |
△ : 보통 |
|
|
X : 현재 불가능 |
공정 별 |
현수준 |
대표 품목 |
대책 |
CVD |
◎ |
(C) PLATE PERF COMMON |
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(C) PLATE, BLOCKER |
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(C) UPPER DOME |
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(C) CERMIC COVER |
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(C) COLLER MIN CONTACT 200 |
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(C) SHIELD |
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(C) WAFER LIFT |
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(C) PUMPING PLATE |
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(C) PLATE WINDOW ITVSERT |
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(C) ISOLATOR CERAMIC PRO 200MM |
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(C) CERAMIC PUMPING INSERT TOP |
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(C) PRODUCER FACE PLATE |
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(C) CERAMIC PUMPING INSERT MID |
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(C) CERAMIC PUMPING INSERT BTM |
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(C) BLOCKER |
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(C) GAS BOX EXTENSION |
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(C) Manifold |
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(C)SHIELD(P-5000) |
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(C) CERAMIC FORK ASSY |
|
○ |
(C) VRB SHIELD 8" |
|
강하넷 |
진단 Report |
◎ : 매우 잘함 |
○ : 잘함 |
△ : 보통 |
|
|
X : 현재 불가능 |
공정 별 |
현수준 |
대표 품목 |
대책 |
METAL |
◎ |
(C) Altus Shower Head |
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(C) MOER RING JOEDIA |
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(C) ONE BODY CLAMP |
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(C) SHIELD CYLINDER |
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(C) DARK SPACE SHIELD |
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(C) SHIELD DEPOSITION |
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(C) SHIELD SUPPORT |
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(C) SHIELD DARK SPACE |
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(C1) SHIELD DARK SPACE |
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(C) SHIELD CHAMBER BOTTOM |
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C) CAP TABLE SHELD |
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DIFFUSION |
◎ |
(C) QUARTZ TUBE |
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BOAT |
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INNER TUBE |
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OUTER TUBE |
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SIC SUSCEPTOR |
|
SHOWER HEAD |
|
IIP |
◎ |
(C) FIGHT TUBE,AL,IMPLANT |
|
강하넷 |
진단 Report |
◎ : 매우 잘함 |
○ : 잘함 |
△ : 보통 |
|
|
X : 현재 불가능 |
재질 별 |
현수준 |
대표 품목 |
이 유 |
CERAMIC |
◎ |
(C2) SHIELD RING T5 |
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(C) DOME CERAMIC DPS |
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(C) Ring Capture |
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(C) Ring Focus |
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(C) Gas Nozzle,Housing |
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(C) Gas Nozzle,Plug |
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(C) Ceramic Inner Point |
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(C) INERPOSER RING |
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(C) WAFER CENTER RING |
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(C) HEAD-SHOWER |
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(C) SSGD Inner |
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(C) SSGD Outer |
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(C) Focus Ring 195mm |
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(C) Ring High Wall 8" |
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(C) Ring Focus ESC 8" |
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(C) Single Ring Ceramic |
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(C) Ring Confinement |
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(C) CERAMIC FILLER RING |
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(C) CERAMIC INNER POINT |
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(C) Ring Capture |
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(C) UPPER DOME |
|
|
(C) CERMIC COVER |
|
|
(C) COLLER MIN CONTACT 200 |
|
|
(C) SHIELD |
|
|
(C) WAFER LIFT |
|
|
(C) PUMPING PLATE |
|
|
(C) ISOLATOR CERAMIC PRO 200MM |
|
|
(C) CERAMIC PUMPING INSERT TOP |
|
|
(C) CERAMIC PUMPING INSERT MID |
|
|
(C) CERAMIC PUMPING INSERT BTM |
|
|
(C)SHIELD(P-5000) |
|
|
(C) CERAMIC FORK ASSY |
|
|
(C) MOER RING JOEDIA |
|
|
강하넷 |
진단 Report |
◎ : 매우 잘함 |
○ : 잘함 |
△ : 보통 |
|
|
X : 현재 불가능 |
재질 별 |
현수준 |
대표 품목 |
대책 |
AL |
◎ |
(C2) SHIELD RING T5 |
|
(C) DOME CERAMIC DPS |
|
(C) Ring Capture |
|
(C) Ring Focus |
|
(C) Gas Nozzle,Housing |
|
(C) Gas Nozzle,Plug |
|
(C) Ceramic Inner Point |
|
(C) INERPOSER RING |
|
(C) WAFER CENTER RING |
|
(C) HEAD-SHOWER |
|
(C) PLATE PERF COMMON |
|
(C) PLATE, BLOCKER |
|
(C) PLATE WINDOW ITVSERT |
|
(C) PRODUCER FACE PLATE |
|
(C) BLOCKER |
|
(C) GAS BOX EXTENSION |
|
(C) Altus Shower Head |
|
SHOWER HEAD |
|
(C) FIGHT TUBE,AL,IMPLANT |
|
○ |
(C) VRB SHIELD 8" |
|
(C) Manifold |
|
SUS |
◎ |
(C) ONE BODY CLAMP |
|
(C) SHIELD CYLINDER |
|
(C) DARK SPACE SHIELD |
|
(C) SHIELD DEPOSITION |
|
(C) SHIELD SUPPORT |
|
(C) SHIELD DARK SPACE |
|
(C1) SHIELD DARK SPACE |
|
(C) SHIELD CHAMBER BOTTOM |
|
C) CAP TABLE SHELD |
|
강하넷 |
진단 Report |
◎ : 매우 잘함 |
○ : 잘함 |
△ : 보통 |
|
|
X : 현재 불가능 |
재질 별 |
현수준 |
대표 품목 |
대책 |
ANODIZING |
◎ |
(C) UPPER CHAMBER(메탈) |
|
|
(C) Upper Chamber DPS-Poly |
|
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(C) UPPER CHAMBER ASS'Y |
|
|
○ |
(C) MXP+ LINE |
|
|
(C) Housing |
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(C) LINER, DGDP, CHMBR |
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(C) LINER, CATH, MAGNET |
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(C) DOOR, SLIT V/V DOOR |
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(C) PLATE BAFFLE(CDRM2) |
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(C) CAHTODE LINER MXP+ |
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(C) MXP+ LINER (WALL LINER) |
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(C) MANOMETER WINDOW |
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(C) EPD WINDOW |
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(C) AL,EXHAUST BAFFLE |
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(C) CHUCK AL |
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(C) UPPER ELEC, AL6061 |
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(C) LOWER ELEC, AL6061 |
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(C) END CAP PLATE |
|
|
(C) TGV LOCKING RING |
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|
(C) TGV PENDDLERUM V/V |
|
|
강하넷 |
진단 Report |
◎ : 매우 잘함 |
○ : 잘함 |
△ : 보통 |
|
|
X : 현재 불가능 |
재질 별 |
현수준 |
대표 품목 |
대책 |
QUARTZ |
◎ |
(C) Ring Confinement Top |
|
(C) Ring Confinement Bottom |
|
(C) Ring QUARTZ Upper |
|
(C) SHADOW RING QUARTZ 200 |
|
(C) UNI INSERT GAS QUARTZ 200 |
|
(C) Quartz Cover Ring |
|
(C) QUARTZ TUBE |
|
BOAT |
|
INNER TUBE |
|
OUTER TUBE |
|
○ |
(C) Ring |
|
GRAPHITE |
◎ |
SIC SUSCEPTOR |
|
○ |
(C) SUPER BOLTED LOWER |
|