공정진단보고서

 (강하넷)

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강하넷	진단 Report		◎ : 매우 잘함
○ : 잘함
△ : 보통
				X : 현재 불가능
공정 별	현수준	대표 품목	대책
CVD	◎	(C) PLATE PERF COMMON
		(C) PLATE, BLOCKER
		(C) UPPER DOME
		(C) CERMIC COVER
		(C) COLLER MIN CONTACT 200
		(C) SHIELD
		(C) WAFER LIFT
		(C) PUMPING PLATE
		(C) PLATE WINDOW ITVSERT
		(C) ISOLATOR CERAMIC PRO 200MM
		(C) CERAMIC PUMPING INSERT TOP
		(C) PRODUCER FACE PLATE
		(C) CERAMIC PUMPING INSERT MID
		(C) CERAMIC PUMPING INSERT BTM
		(C) BLOCKER
		(C) GAS BOX EXTENSION
		(C) Manifold
		(C)SHIELD(P-5000)
		(C) CERAMIC FORK ASSY
	○	(C) VRB SHIELD 8"
강하넷	진단 Report		◎ : 매우 잘함
○ : 잘함
△ : 보통
				X : 현재 불가능
공정 별	현수준	대표 품목	대책
METAL	◎	(C) Altus Shower Head
		(C) MOER RING JOEDIA
		(C) ONE BODY CLAMP
		(C) SHIELD CYLINDER
		(C) DARK SPACE SHIELD
		(C) SHIELD DEPOSITION
		(C) SHIELD SUPPORT
		(C) SHIELD DARK SPACE
		(C1) SHIELD DARK SPACE
		(C) SHIELD CHAMBER BOTTOM
		C) CAP TABLE SHELD
DIFFUSION	◎	(C) QUARTZ TUBE
		BOAT
		INNER TUBE
		OUTER TUBE
		SIC SUSCEPTOR
		SHOWER HEAD
IIP	◎	(C) FIGHT TUBE,AL,IMPLANT
강하넷	진단 Report		◎ : 매우 잘함
○ : 잘함
△ : 보통
				X : 현재 불가능
재질 별	현수준	대표 품목	이 유
CERAMIC	◎	(C2) SHIELD RING T5
		(C) DOME CERAMIC DPS
		(C) Ring Capture
		(C) Ring Focus
		(C) Gas Nozzle,Housing
		(C) Gas Nozzle,Plug
		(C) Ceramic Inner Point
		(C) INERPOSER RING
		(C) WAFER CENTER RING
		(C) HEAD-SHOWER
		(C) SSGD Inner
		(C) SSGD Outer
		(C) Focus Ring 195mm
		(C) Ring High Wall 8"
		(C) Ring Focus ESC 8"
		(C) Single Ring Ceramic
		(C) Ring Confinement
		(C) CERAMIC FILLER RING
		(C) CERAMIC INNER POINT
		(C) Ring Capture
		(C) UPPER DOME
		(C) CERMIC COVER
		(C) COLLER MIN CONTACT 200
		(C) SHIELD
		(C) WAFER LIFT
		(C) PUMPING PLATE
		(C) ISOLATOR CERAMIC PRO 200MM
		(C) CERAMIC PUMPING INSERT TOP
		(C) CERAMIC PUMPING INSERT MID
		(C) CERAMIC PUMPING INSERT BTM
		(C)SHIELD(P-5000)
		(C) CERAMIC FORK ASSY
		(C) MOER RING JOEDIA
강하넷	진단 Report		◎ : 매우 잘함
○ : 잘함
△ : 보통
				X : 현재 불가능
재질 별	현수준	대표 품목	대책
AL	◎	(C2) SHIELD RING T5
		(C) DOME CERAMIC DPS
		(C) Ring Capture
		(C) Ring Focus
		(C) Gas Nozzle,Housing
		(C) Gas Nozzle,Plug
		(C) Ceramic Inner Point
		(C) INERPOSER RING
		(C) WAFER CENTER RING
		(C) HEAD-SHOWER
		(C) PLATE PERF COMMON
		(C) PLATE, BLOCKER
		(C) PLATE WINDOW ITVSERT
		(C) PRODUCER FACE PLATE
		(C) BLOCKER
		(C) GAS BOX EXTENSION
		(C) Altus Shower Head
		SHOWER HEAD
		(C) FIGHT TUBE,AL,IMPLANT
	○	(C) VRB SHIELD 8"
		(C) Manifold
SUS	◎	(C) ONE BODY CLAMP
		(C) SHIELD CYLINDER
		(C) DARK SPACE SHIELD
		(C) SHIELD DEPOSITION
		(C) SHIELD SUPPORT
		(C) SHIELD DARK SPACE
		(C1) SHIELD DARK SPACE
		(C) SHIELD CHAMBER BOTTOM
		C) CAP TABLE SHELD
강하넷	진단 Report		◎ : 매우 잘함
○ : 잘함
△ : 보통
				X : 현재 불가능
재질 별	현수준	대표 품목	대책
ANODIZING	◎	(C) UPPER CHAMBER(메탈)
		(C) Upper Chamber DPS-Poly
		(C) UPPER CHAMBER ASS'Y
	○	(C) MXP+ LINE
		(C) Housing
		(C) LINER, DGDP, CHMBR
		(C) LINER, CATH, MAGNET
		(C) DOOR, SLIT V/V DOOR
		(C) PLATE BAFFLE(CDRM2)
		(C) CAHTODE LINER MXP+
		(C) MXP+ LINER (WALL LINER)
		(C) MANOMETER WINDOW
		(C) EPD WINDOW
		(C) AL,EXHAUST BAFFLE
		(C) CHUCK AL
		(C) UPPER ELEC, AL6061
		(C) LOWER ELEC, AL6061
		(C) END CAP PLATE
		(C) TGV LOCKING RING
		(C) TGV PENDDLERUM V/V
강하넷	진단 Report		◎ : 매우 잘함
○ : 잘함
△ : 보통
				X : 현재 불가능
재질 별	현수준	대표 품목	대책
QUARTZ	◎	(C) Ring Confinement Top
		(C) Ring Confinement Bottom
		(C) Ring QUARTZ Upper
		(C) SHADOW RING QUARTZ 200
		(C) UNI INSERT GAS QUARTZ 200
		(C) Quartz Cover Ring
		(C) QUARTZ TUBE
		BOAT
		INNER TUBE
		OUTER TUBE
	○	(C) Ring
GRAPHITE	◎	SIC SUSCEPTOR
	○	(C) SUPER BOLTED LOWER

 

 

 

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