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　 　 　 회   의   록 결 재 작  성 검  토 승  인
　 　 　 　
　 　 　 　 　 　 　 　 　 　
회의  일시 　 　 시  간 　         ~ 　 　
주관  부서 　 　 회의 장소 　 　 　 　
참석  대상 　 　 기록자 　 　 　 　
회의  안건 　 　 　 　
　 소속 직 위 성 명 확 인 소  속 　 직  위 성명 확인
참 　 　 　 　 　 　 　 　 　
석 　 　 　 　 　 　 　 　 　
자 　 　 　 　 　 　 　 　 　
확 　 　 　 　 　 　 　 　 　
인 　 　 　 　 　 　 　 　 　
　 　 　 　 회   의   내   용 　 　 　 　 　
NO 세부협의 안건 대책 및 협의 안건 　 비   고
　 　 　 　
　 　 　 　
　 　 　 　
　 　 　 　
　 　 　 　
　 　 　 　
　 　 　 　
　 　 　 　
　 　 　 　
　 　 　 　
　 　 　 　
　 　 　 　
　 　 　 　
　 　 　 　
　 　 　 　
　 　 　 　
　 　 　 　
　 　 　 　
　 　 　 　
　 　 　 　
　 　 　 　
　 　 　 　
　 　 　 　
　 　 　 　
　 　 　 　
　 　 　 　
　 　 　 　
　 　 　 　
　 　 　 　
　 　 　 　
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서비스 불만전표

 

서비스/불만 전표

 

□ 서비스 □ 고객불만

 

 

접수 No.

 

고 객 명

 

고객 연락처

 

고객측 담당자

 

접 수 일 자

20 . . .

제 품 명

 

규 격

 

수 량

 

서비스 / 불만 요구사항

 

처리 요구일자

20 . . .

접 수 자

󰂙

원인 및 대책

 

조사일자 20 . . . 조사자 󰂙

서비스 / 불만 처리내용

 

처리일자 20 . . . 처리자 󰂙

처리결과 확인

 

□ 만 족 □ 불 만 족

확인일자 20 . . . 확인자 󰂙

 

(주)강하넷 P2301-01 Rev.0 A4 (210x297mm)







 

 

 

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강하넷 진단 Report           ◎ : 매우 잘함
   ○ : 잘함
   △ : 보통
　 　                X : 현재 불가능
공정 별 현수준 대표 품목 대책
CVD ◎ (C) PLATE PERF COMMON 　
(C) PLATE, BLOCKER 　
(C) UPPER DOME 　
(C) CERMIC COVER 　
(C) COLLER MIN CONTACT 200 　
(C) SHIELD 　
(C) WAFER LIFT 　
(C) PUMPING PLATE 　
(C) PLATE WINDOW ITVSERT 　
(C) ISOLATOR CERAMIC PRO 200MM 　
(C) CERAMIC PUMPING INSERT TOP 　
(C) PRODUCER FACE PLATE 　
(C) CERAMIC PUMPING INSERT MID 　
(C) CERAMIC PUMPING INSERT BTM 　
(C) BLOCKER 　
(C) GAS BOX EXTENSION 　
(C) Manifold 　
(C)SHIELD(P-5000) 　
(C) CERAMIC FORK ASSY 　
○ (C) VRB SHIELD 8" 　
강하넷 진단 Report           ◎ : 매우 잘함
   ○ : 잘함
   △ : 보통
　 　                X : 현재 불가능
공정 별 현수준 대표 품목 대책
METAL ◎ (C) Altus Shower Head 　
(C) MOER RING JOEDIA 　
(C) ONE BODY CLAMP 　
(C) SHIELD CYLINDER 　
(C) DARK SPACE SHIELD 　
(C) SHIELD DEPOSITION 　
(C) SHIELD SUPPORT 　
(C) SHIELD DARK SPACE 　
(C1) SHIELD DARK SPACE 　
(C) SHIELD CHAMBER BOTTOM 　
C) CAP TABLE SHELD 　
DIFFUSION ◎ (C) QUARTZ TUBE 　
BOAT 　
INNER TUBE 　
OUTER TUBE 　
SIC SUSCEPTOR 　
SHOWER HEAD 　
IIP ◎ (C) FIGHT TUBE,AL,IMPLANT 　
강하넷 진단 Report           ◎ : 매우 잘함
   ○ : 잘함
   △ : 보통
　 　               X : 현재 불가능
재질 별 현수준 대표 품목 이 유
CERAMIC ◎ (C2) SHIELD RING T5 　 　
(C) DOME CERAMIC DPS 　 　
(C) Ring Capture 　 　
(C) Ring Focus 　 　
(C) Gas Nozzle,Housing 　 　
(C) Gas Nozzle,Plug  　 　
(C) Ceramic Inner Point 　 　
(C) INERPOSER RING 　 　
(C) WAFER CENTER RING 　 　
(C) HEAD-SHOWER 　 　
(C) SSGD Inner 　 　
(C) SSGD Outer 　 　
(C) Focus Ring 195mm  　 　
(C) Ring High Wall 8" 　 　
(C) Ring Focus ESC 8" 　 　
(C) Single Ring Ceramic 　 　
(C) Ring Confinement  　 　
(C) CERAMIC FILLER RING 　 　
(C) CERAMIC INNER POINT 　 　
(C) Ring Capture 　 　
(C) UPPER DOME 　 　
(C) CERMIC COVER 　 　
(C) COLLER MIN CONTACT 200 　 　
(C) SHIELD 　 　
(C) WAFER LIFT 　 　
(C) PUMPING PLATE 　 　
(C) ISOLATOR CERAMIC PRO 200MM 　 　
(C) CERAMIC PUMPING INSERT TOP 　 　
(C) CERAMIC PUMPING INSERT MID 　 　
(C) CERAMIC PUMPING INSERT BTM 　 　
(C)SHIELD(P-5000) 　 　
(C) CERAMIC FORK ASSY 　 　
(C) MOER RING JOEDIA 　 　
강하넷 진단 Report           ◎ : 매우 잘함
   ○ : 잘함
   △ : 보통
　 　                X : 현재 불가능
재질 별 현수준 대표 품목 대책
AL ◎ (C2) SHIELD RING T5 　
(C) DOME CERAMIC DPS 　
(C) Ring Capture 　
(C) Ring Focus 　
(C) Gas Nozzle,Housing 　
(C) Gas Nozzle,Plug  　
(C) Ceramic Inner Point 　
(C) INERPOSER RING 　
(C) WAFER CENTER RING 　
(C) HEAD-SHOWER 　
(C) PLATE PERF COMMON 　
(C) PLATE, BLOCKER 　
(C) PLATE WINDOW ITVSERT 　
(C) PRODUCER FACE PLATE 　
(C) BLOCKER 　
(C) GAS BOX EXTENSION 　
(C) Altus Shower Head 　
SHOWER HEAD 　
(C) FIGHT TUBE,AL,IMPLANT 　
○ (C) VRB SHIELD 8" 　
(C) Manifold 　
SUS ◎ (C) ONE BODY CLAMP 　
(C) SHIELD CYLINDER 　
(C) DARK SPACE SHIELD 　
(C) SHIELD DEPOSITION 　
(C) SHIELD SUPPORT 　
(C) SHIELD DARK SPACE 　
(C1) SHIELD DARK SPACE 　
(C) SHIELD CHAMBER BOTTOM 　
C) CAP TABLE SHELD 　
강하넷 진단 Report           ◎ : 매우 잘함
   ○ : 잘함
   △ : 보통
　 　                X : 현재 불가능
재질 별 현수준 대표 품목 대책
ANODIZING ◎ (C) UPPER CHAMBER(메탈) 　 　
(C) Upper Chamber DPS-Poly 　 　
(C) UPPER CHAMBER ASS'Y 　 　
○ (C) MXP+ LINE 　 　
(C) Housing 　 　
(C) LINER, DGDP, CHMBR 　 　
(C) LINER, CATH, MAGNET 　 　
(C) DOOR, SLIT V/V DOOR 　 　
(C) PLATE BAFFLE(CDRM2) 　 　
(C) CAHTODE LINER MXP+ 　 　
(C) MXP+ LINER (WALL LINER) 　 　
(C) MANOMETER WINDOW 　 　
(C) EPD WINDOW 　 　
(C) AL,EXHAUST BAFFLE 　 　
(C) CHUCK AL 　 　
(C) UPPER ELEC, AL6061 　 　
(C) LOWER ELEC, AL6061 　 　
(C) END CAP PLATE 　 　
(C) TGV LOCKING RING 　 　
(C) TGV PENDDLERUM V/V 　 　
강하넷 진단 Report           ◎ : 매우 잘함
   ○ : 잘함
   △ : 보통
　 　                X : 현재 불가능
재질 별 현수준 대표 품목 대책
QUARTZ ◎ (C) Ring Confinement Top 　
(C) Ring Confinement Bottom 　
(C) Ring QUARTZ Upper 　
(C) SHADOW RING QUARTZ 200 　
(C) UNI INSERT GAS QUARTZ 200 　
(C) Quartz Cover Ring 　
(C) QUARTZ TUBE 　
BOAT 　
INNER TUBE 　
OUTER TUBE 　
○ (C) Ring 　
GRAPHITE ◎ SIC SUSCEPTOR 　
○ (C) SUPER BOLTED LOWER 　








 

 

 

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